EBARA launched a new line of exhaust gas treatment equipment for semiconductor manufacturing, including the Model TND-Single and the Model TND-Single Plus. Featuring a new type of burner, it enables high efficient incineration with reduced loss of thermal energy and achieves low NOx and low CO. The products also include an auto-deposit function, wet wall form function and an inner-tank stirring function to extend the maintenance interval. An addition of a wet treatment process before the burner removes process gasses that generate a large amount of deposits and reduces the amount of powder generated inside the burner.
The TND-Single has a maximum gas inlet of four, with the TND-Single Plus maxing out at two gas inlets. Both models have a maximum gas influx volume of 200 (L/min)2 per port and 400 (L/min)2 per burner. They are suitable for city gas or propane gas.
